Sub-10 nm Feature Size PS-b-PDMS Block Copolymer Structures Fabricated by a Microwave-Assisted Solvothermal Process-Reference-Cited by-同舟云学术

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Sub-10 nm Feature Size PS-b-PDMS Block Copolymer Structures Fabricated by a Microwave-Assisted Solvothermal Process

Published:2013-03-07 Issue:6 Volume:5 Page:2004-2012
ISSN:1944-8244
Container-title:ACS Applied Materials & Interfaces
language:en
Short-container-title:ACS Appl. Mater. Interfaces

Author:

Borah Dipu¹²³,Shaw Matthew T¹²³⁴,Holmes Justin D¹²³,Morris Michael A¹²³

Affiliation:

1. Materials Chemistry Section, Department of Chemistry, University College Cork, College Road, Cork, Ireland

2. Centre for Adaptive Nanostructures and Nanodevices (CRANN), Trinity College Dublin, College Green, Dublin 2, Ireland

3. Tyndall National Institute, Lee Maltings, Prospect Row, Cork, Ireland

4. Intel Ireland Limited, Collinstown Industrial Estate, Leixlip, Co. Kildare, Ireland

Publisher

American Chemical Society (ACS)

Subject

General Materials Science

Link

https://pubs.acs.org/doi/pdf/10.1021/am302830w

Reference46 articles.

1. Lateral Ordering of Cylindrical Microdomains Under Solvent Vapor

2. Limits of lithography

3. Pushing the limits of lithography

4. Resolution limits for electron-beam lithography

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