Limits of lithography-Reference-Cited by-同舟云学术

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Limits of lithography

Published:2001-03 Issue:3 Volume:89 Page:366-374
ISSN:0018-9219
Container-title:Proceedings of the IEEE
language:
Short-container-title:Proc. IEEE

Author:

Harriott L.R.

Publisher

Institute of Electrical and Electronics Engineers (IEEE)

Subject

Electrical and Electronic Engineering

Link

http://xplorestaging.ieee.org/ielx5/5/19772/00915379.pdf?arnumber=915379

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