1. Hasselt University, Institute for Materials Research (IMO-IMOMEC) 1, 3590 Diepenbeek, Belgium
2. IMEC, Division IMOMEC, Wetenschapspark 1, B-3590 Diepenbeek, Belgium
3. Centre for Microsystems Technology (CMST), IMEC and Ghent University, Technologiepark 126, 9052 Gent, Belgium