Dopamine-Mediated Polymer Coating Facilitates Area-Selective Atomic Layer Deposition

Author:

Papananou Hellen1,Katsumata Reika2ORCID,Neary Zachary1,Goh Rubayn1,Meng Xiangxi1ORCID,Limary Ratchana3,Segalman Rachel A.14ORCID

Affiliation:

1. Materials Research Laboratory, University of California, Santa Barbara, California 93106-9010, United States

2. Polymer Science and Engineering, University of Massachusetts Amherst, Amherst, Massachusetts 01003, United States

3. Lam Research Corporation, Austin, Texas 94538-0000, United States

4. Department of Chemical Engineering, University of California, Santa Barbara, California 93106-9010, United States

Funder

Basic Energy Sciences

Dow Chemical Company

Lam

Publisher

American Chemical Society (ACS)

Subject

Organic Chemistry,Polymers and Plastics,Process Chemistry and Technology

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