Sampling Depths, Depth Shifts, and Depth Resolutions for Bin+ Ion Analysis in Argon Gas Cluster Depth Profiles
Author:
Affiliation:
1. Analytical Science Division, National Physical Laboratory, Teddington, Middlesex TW11 0LW, U.K.
Funder
Department for Business, Innovation and Skills
European Commission
European Association of National Metrology Institutes
Publisher
American Chemical Society (ACS)
Subject
Materials Chemistry,Surfaces, Coatings and Films,Physical and Theoretical Chemistry
Link
https://pubs.acs.org/doi/pdf/10.1021/acs.jpcb.5b12697
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