Terpolymerization of Styrenic Photoresist Polymers: Effect of RAFT Polymerization on the Compositional Heterogeneity-Reference-Cited by-同舟云学术

Terpolymerization of Styrenic Photoresist Polymers: Effect of RAFT Polymerization on the Compositional Heterogeneity

Published:2015-05-22 Issue:11 Volume:48 Page:3438-3448
ISSN:0024-9297
Container-title:Macromolecules
language:en
Short-container-title:Macromolecules

Author:

Guo Yi¹,Hill David J. T.¹,Whittaker Andrew K.¹,Jack Kevin S.¹,Peng Hui¹

Affiliation:

1. Australian Institute for Bioengineering and Nanotechnology, ‡School of Chemistry & Molecular Biosciences, §Centre for Advanced Imaging, ∥Australian Research Council Centre for Convergent Bio-Nano Science and Technology, and ⊥Centre for Microscopy and Microanalysis, The University of Queensland St Lucia, Brisbane, Queensland 4072, Australia

Funder

Australian Research Council

University of Queensland

Publisher

American Chemical Society (ACS)

Subject

Materials Chemistry,Inorganic Chemistry,Polymers and Plastics,Organic Chemistry

Link

https://pubs.acs.org/doi/pdf/10.1021/acs.macromol.5b00683

Reference77 articles.

1. Lithographic Imaging Techniques for the Formation of Nanoscopic Features

2. Photoresist Latent and Developer Images as Probed by Neutron Reflectivity Methods

3. Linking EUV lithography line edge roughness and 16nm NAND memory performance

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