Depth-Resolved Structure Analysis of Cylindrical Microdomain in Block Copolymer Thin Film by Grazing-Incidence Small-Angle X-ray Scattering Utilizing Low-Energy X-rays
Author:
Affiliation:
1. Department of Materials Science and Engineering, Graduate School of Engineering, Nagoya Institute of Technology, Gokiso-cho, Showa-ku, Nagoya 466-8555, Japan
2. Nitto Denko Corporation, 1-1-2, Shimohozumi, Ibaraki, Osaka 567-8680, Japan
Funder
Ministry of Education, Culture, Sports, Science, and Technology
Tatematsu Foundation
Research Foundation for the Electrotechnology of Chubu
Publisher
American Chemical Society (ACS)
Subject
Materials Chemistry,Inorganic Chemistry,Polymers and Plastics,Organic Chemistry
Link
https://pubs.acs.org/doi/pdf/10.1021/acs.macromol.5b01883
Reference63 articles.
1. Thickness Dependence of Neutral Parameter Windows for Perpendicularly Oriented Block Copolymer Thin Films
2. Effect of Film Thickness on the Phase Behaviors of Diblock Copolymer Thin Film
3. Lamellar Orientation at the Surface of Thin Block Copolymer Films
4. Phase Transitions of Block Copolymer Film on Homopolymer-Grafted Substrate
5. Control of Self-Assembly of Lithographically Patternable Block Copolymer Films
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