1. Łukasiewicz Research Network─PORT Polish Center for Technology Development, Stablowicka 147, 54-066 Wrocław, Poland
2. Institute of Low Temperature and Structure Research, Polish Academy of Sciences, Okólna 2, 50-422 Wrocław, Poland
3. Department of Semiconductor Materials Engineering, Wrocław University of Science and Technology, Wybrzeże Wyspiańskiego 27, 50-370 Wrocław, Poland