Application of an Sb Surfactant in InGaAs Nano-ridge Engineering on 300 mm Silicon Substrates
Author:
Affiliation:
1. Imec, Kapeldreef 75, 3001 Leuven, Belgium
Publisher
American Chemical Society (ACS)
Subject
Condensed Matter Physics,General Materials Science,General Chemistry
Link
https://pubs.acs.org/doi/pdf/10.1021/acs.cgd.0c01486
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