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Free-Standing Silicon Nanogratings for Extreme UV Rejection

  • Published:2014-06-20 Issue:7 Volume:1 Page:554-559
  • ISSN:2330-4022
  • Container-title:ACS Photonics
  • language:en
  • Short-container-title:ACS Photonics

Author:

Kaplan Alex F.1,Gilbert Jason A.2,Trabert Rachel2,Zurbuchen Thomas H.2,Guo L. Jay1

Affiliation:

1. Electrical Engineering and Computer Science, University of Michigan, 1301 Beal Avenue, Ann Arbor, Michigan 48109, United States

2. Atmospheric, Oceanic and Space Sciences, Zurbuchen University of Michigan, 2455 Hayward Street, Ann Arbor, Michigan 48109, United States

Publisher

American Chemical Society (ACS)

Subject

Electrical and Electronic Engineering,Atomic and Molecular Physics, and Optics,Biotechnology,Electronic, Optical and Magnetic Materials

Cited by 5 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. A broadband tunable laser design based on the distributed Moiré-grating reflector;Optics Communications;2020-03

2. Arcus: the soft x-ray grating explorer;UV, X-Ray, and Gamma-Ray Space Instrumentation for Astronomy XXI;2019-09-09

3. Advances in Nanoimprint Lithography;Annual Review of Chemical and Biomolecular Engineering;2016-06-07

4. Invited Article: Characterization of background sources in space-based time-of-flight mass spectrometers;Review of Scientific Instruments;2014-09

5. Correction to Free-Standing Silicon Nanogratings for Extreme UV Rejection;ACS Photonics;2014-08-11
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