Patterning of SnO2 Thin Films by Combination of Lithographic Photoirradiation and Pyrolysis of an Organotin Polymer-Reference-Cited by-同舟云学术

Patterning of SnO2 Thin Films by Combination of Lithographic Photoirradiation and Pyrolysis of an Organotin Polymer

Published:1997-12-01 Issue:12 Volume:9 Page:2674-2675
ISSN:0897-4756
Container-title:Chemistry of Materials
language:en
Short-container-title:Chem. Mater.

Author:

Tamai Toshiyuki¹,Ichinose Nobuyuki¹,Kawanishi Shunichi¹,Nishii Masanobu¹,Sasuga Tsuneo¹,Hashida Isao¹,Mizuno Kazuhiko¹

Affiliation:

1. Osaka Municipal Technical Research Institute 1-6-50 Morinomiya, Joto-ku Osaka 536, Japan Kansai Research Establishment Japan Atomic Energy Research Institute 25-1 Mii-minamimachi, Neyagawa Osaka 572, Japan Department of Applied Chemistry College of Engineering Osaka Prefecture University 1-1 Gakuen-cho, Sakai, Osaka 593, Japan

Publisher

American Chemical Society (ACS)

Subject

Materials Chemistry,General Chemical Engineering,General Chemistry

Link

https://pubs.acs.org/doi/pdf/10.1021/cm970276e

Reference20 articles.

1. Light-Directed, Spatially Addressable Parallel Chemical Synthesis

2. Micropatterning proteins and synthetic peptides on solid supports: a novel application for microelectronics fabrication technology

3. Coplanar molecular assemblies of amino- and perfluorinated alkylsilanes: characterization and geometric definition of mammalian cell adhesion and growth

4. Photochemical functionalization of polymer surfaces and the production of biomolecule-carrying micrometer-scale structures by deep-UV lithography using 4-substituted perfluorophenyl azides

5. Novel Surface Graft Copolymerization Method with Micron-Order Regional Precision

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