Thermally Stable Antireflective Coatings Based on Nanoporous Organosilicate Thin Films
Author:
Affiliation:
1. School of Chemical & Biological Engineering, NANO Systems Institute - National Core Research Center (NCRC), Seoul National University, Seoul 151-744, Korea, and School of Advanced Materials, Kookmin University, Seoul 136-702, Korea
Publisher
American Chemical Society (ACS)
Subject
Electrochemistry,Spectroscopy,Surfaces and Interfaces,Condensed Matter Physics,General Materials Science
Link
https://pubs.acs.org/doi/pdf/10.1021/la070003q
Reference14 articles.
1. Reversibly erasable nanoporous anti-reflection coatings from polyelectrolyte multilayers
2. Anti-Reflection Surface with Particle Coating Deposited by Electrostatic Attraction
3. Subwavelength-structured antireflective surfaces on glass
4. Organosilicate Spin-On Glasses
5. Structure and Interaction of Organic/Inorganic Hybrid Nanocomposites for Microelectronic Applications. 1. MSSQ/P(MMA-co-DMAEMA) Nanocomposites
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