Structure and Interaction of Organic/Inorganic Hybrid Nanocomposites for Microelectronic Applications. 1. MSSQ/P(MMA-co-DMAEMA) Nanocomposites-Reference-Cited by-同舟云学术

Structure and Interaction of Organic/Inorganic Hybrid Nanocomposites for Microelectronic Applications. 1. MSSQ/P(MMA-co-DMAEMA) Nanocomposites

Published:2002-08-13 Issue:9 Volume:14 Page:3676-3685
ISSN:0897-4756
Container-title:Chemistry of Materials
language:en
Short-container-title:Chem. Mater.

Author:

Huang Q. R.¹,Volksen Willi¹,Huang Elbert¹,Toney M.¹,Frank Curtis W.¹,Miller Robert D.¹

Affiliation:

1. Department of Chemical Engineering, Stanford University, Stanford, California 94305, IBM Almaden Research Center, 650 Harry Road, San Jose, California 95120, and IBM T. J. Watson Research Center, Kitchawan Road/Route 134, Yorktown Heights, New York 10598

Publisher

American Chemical Society (ACS)

Subject

Materials Chemistry,General Chemical Engineering,General Chemistry

Link

https://pubs.acs.org/doi/pdf/10.1021/cm020014z

Reference61 articles.

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2. Low dielectric constant polymers for microelectronics

3. Nanoporous Polyimides

4. In Search of Low- k Dielectrics

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