1. Micro and Nanosystems, Department of Mechanical and Process
Engineering, ETH Zurich, Tannenstrasse 3, 8092 Zurich, Switzerland
2. Institute of Robotics and Intelligent Systems, Department of Mechanical
and Process Engineering, ETH Zurich, 8092 Zurich, Switzerland
3. Particle Technology Laboratory, Department
of Mechanical and Process Engineering, ETH Zurich, 8092 Zurich, Switzerland
4. Robotics
Engineering Department, DGIST-ETH Microrobot Center, Daegu Gyeongbuk Institute of Science and Technology (DGIST), Daegu, Korea