Thermal Atomic Layer Etching of SiO2 by a “Conversion-Etch” Mechanism Using Sequential Reactions of Trimethylaluminum and Hydrogen Fluoride
Author:
Affiliation:
1. Department of Chemistry and Biochemistry, and ‡Department of Mechanical Engineering, University of Colorado at Boulder, Boulder, Colorado 80309, United States
Funder
Division of Chemistry
Defense Advanced Research Projects Agency
Publisher
American Chemical Society (ACS)
Subject
General Materials Science
Link
https://pubs.acs.org/doi/pdf/10.1021/acsami.7b01259
Reference70 articles.
1. Atomic Layer Etching: An Industry Perspective
2. TABULATED FUNCTIONS FOR HETEROGENEOUS REACTION RATES: THE ATTACK OF VITREOUS SILICA BY HYDROFLUORIC ACID
3. A review of the chemical reaction mechanism and kinetics for hydrofluoric acid etching of silicon dioxide for surface micromachining applications
4. Wet chemical etching of silicate glasses in hydrofluoric acid based solutions
Cited by 99 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献
1. Thermal Atomic Layer Etching of Molybdenum Using Sequential Oxidation and Deoxychlorination Reactions;Chemistry of Materials;2024-01-29
2. Topographically-selective atomic layer etching of SiO2 using radical fluorination of the surface followed by Ar ion bombardment;Japanese Journal of Applied Physics;2023-12-01
3. Molecular layer deposition of hybrid silphenylene-based dielectric film;Advanced Composites and Hybrid Materials;2023-10
4. Isotropic plasma-thermal atomic layer etching of superconducting titanium nitride films using sequential exposures of molecular oxygen and SF6/H2 plasma;Journal of Vacuum Science & Technology A;2023-09-26
5. Area-Selective Low-Pressure Thermal Atomic Layer Deposition of Aluminum Nitride;The Journal of Physical Chemistry C;2023-08-17
1.学者识别学者识别
2.学术分析学术分析
3.人才评估人才评估
"同舟云学术"是以全球学者为主线,采集、加工和组织学术论文而形成的新型学术文献查询和分析系统,可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容,当前同舟云学术共收录了国内外主流学术期刊6万余种,收集的期刊论文及会议论文总量共计约1.5亿篇,并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询!咨询电话:010-8811{复制后删除}0370
www.globalauthorid.com
TOP
Copyright © 2019-2024 北京同舟云网络信息技术有限公司 京公网安备11010802033243号 京ICP备18003416号-3