Atmospheric Pressure Plasma Jet-Assisted Synthesis of Zeolite-Based Low-k Thin Films
Author:
Affiliation:
1. Department of Chemical Engineering and Biotechnology, National Taipei University of Technology, Taipei 10608, Taiwan
Funder
Ministry of Science and Technology, Taiwan
Publisher
American Chemical Society (ACS)
Subject
General Materials Science
Link
https://pubs.acs.org/doi/pdf/10.1021/acsami.7b16410
Reference57 articles.
1. Low-k dielectric materials
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