Conduction Mechanisms at Interface of AlN/SiN Dielectric Stacks with AlGaN/GaN Heterostructures for Normally-off High Electron Mobility Transistors: Correlating Device Behavior with Nanoscale Interfaces Properties
Author:
Affiliation:
1. Consiglio Nazionale delle Ricerche−Istituto per la Microelettronica e Microsistemi (CNR-IMM), Strada VIII, No. 5, Zona Industriale, 95121 Catania, Italy
2. STMicroelectronics, Stradale Primosole 50, 95121 Catania, Italy
Funder
Ministero dell?Istruzione, dell?Universit? e della Ricerca
Publisher
American Chemical Society (ACS)
Subject
General Materials Science
Link
https://pubs.acs.org/doi/pdf/10.1021/acsami.7b08935
Reference52 articles.
1. GaN-on-Si Power Technology: Devices and Applications
2. AlGaN/GaN two-dimensional-electron gas heterostructures on 200 mm diameter Si(111)
3. Prospects for the application of GaN power devices in hybrid electric vehicle drive systems
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5. Recessed-gate structure approach toward normally off high-Voltage AlGaN/GaN HEMT for power electronics applications
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