Pushing the Limits of Piezoresistive Effect by Optomechanical Coupling in 3C-SiC/Si Heterostructure
Author:
Affiliation:
1. Centre for Quantum Dynamics, Griffith University, Brisbane, Queensland, Australia 4111
Funder
Australian Research Council
Publisher
American Chemical Society (ACS)
Subject
General Materials Science
Link
https://pubs.acs.org/doi/pdf/10.1021/acsami.7b12128
Reference30 articles.
1. Highly Sensitive, Flexible, and Wearable Pressure Sensor Based on a Giant Piezocapacitive Effect of Three-Dimensional Microporous Elastomeric Dielectric Layer
2. Micro/nano-mechanical sensors and actuators based on SOI-MEMS technology
3. Design and fabrication of a miniaturized six-degree-of-freedom piezoresistive accelerometer
4. Reversible Strain-Induced Electron–Hole Recombination in Silicon Nanowires Observed with Femtosecond Pump–Probe Microscopy
5. The Piezoresistive Effect of SiC for MEMS Sensors at High Temperatures: A Review
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