Tungsten Nitride Inverse Opals by Atomic Layer Deposition
Author:
Affiliation:
1. Department of Chemistry and Biochemistry, University of California, Los Angeles, California 90095, and Department of Chemistry, Harvard University, Cambridge, Massachusetts 02138
Publisher
American Chemical Society (ACS)
Subject
Mechanical Engineering,Condensed Matter Physics,General Materials Science,General Chemistry,Bioengineering
Link
https://pubs.acs.org/doi/pdf/10.1021/nl034362r
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