UV Laser Photolysis of Disiloxanes for Chemical Vapor Deposition of Nano-Textured Silicones-Reference-Cited by-同舟云学术

UV Laser Photolysis of Disiloxanes for Chemical Vapor Deposition of Nano-Textured Silicones

Published:2001-12-04 Issue:1 Volume:14 Page:144-153
ISSN:0897-4756
Container-title:Chemistry of Materials
language:en
Short-container-title:Chem. Mater.

Author:

Pola Josef¹,Galíková Anna¹,Galík Aftanas¹,Blechta Vratislav¹,Bastl Zdeněk¹,Šubrt Jan¹,Ouchi Akihiko¹

Affiliation:

1. Institute of Chemical Process Fundamentals, Academy of Sciences of the Czech Republic, 165 02 Prague, Czech Republic, J. Heyrovský Institute of Physical Chemistry, Academy of Sciences of the Czech Republic, 182 23 Prague 8, Czech Republic, Institute of Inorganic Chemistry, Academy of Sciences of the Czech Republic 250 68 Řež near Prague, Czech Republic, and National Institute of Materials and Chemical Research, AIST, MITI, Tsukuba, Ibaraki 305, Japan

Publisher

American Chemical Society (ACS)

Subject

Materials Chemistry,General Chemical Engineering,General Chemistry

Link

https://pubs.acs.org/doi/pdf/10.1021/cm011109o

Reference67 articles.

1. Characterization of the pyrolytic conversion of polysilsesquioxanes to silicon oxycarbides

2. Nanostructural Characterization of Silicon Oxycarbide Glasses and Glass-Ceramics

3. Role of Precursor Molecular Structure on the Microstructure and High Temperature Stability of Silicon Oxycarbide Glasses Derived from Methylene-Bridged Polycarbosilanes

4. Structural Characterization of Sol-Gel Derived Oxycarbide Glasses. 1. Study of the Pyrolysis Process

5. Polysiloxane Pyrolysis

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