Fabrication of Well-Organized and Densely Packed Si Nanopillars Containing SiGe Nanodots by Using Block Copolymer Templates-Reference-Cited by-同舟云学术

Fabrication of Well-Organized and Densely Packed Si Nanopillars Containing SiGe Nanodots by Using Block Copolymer Templates

Published:2008-09-23 Issue:19 Volume:20 Page:6183-6188
ISSN:0897-4756
Container-title:Chemistry of Materials
language:en
Short-container-title:Chem. Mater.

Author:

Aissou Karim¹,Baron Thierry¹,Kogelschatz Martin¹,Hertog Martien Den¹,Rouvière Jean Luc¹,Hartmann Jean-Michel¹,Pélissier Bernard¹

Affiliation:

1. Laboratoire des Technologies de la Microélectronique, Centre National de la Recherche Scientifique, 17 Rue des Martyrs, 38054 Grenoble, France, Laboratoire d’Etude des Materiaux par Microscopie Avancee, Commissariat à l'Énergie Atomique/Institute for Nanoscience and Cryogenics, Commissariat à l'Énergie Atomique−Grenoble, 17 rue des Martyrs, 38052 Grenoble Cedex 9, France, and Laboratoire d’Electronique et de Technologies de l’Information, Commissariat à l'Énergie Atomique

Publisher

American Chemical Society (ACS)

Subject

Materials Chemistry,General Chemical Engineering,General Chemistry

Link

https://pubs.acs.org/doi/pdf/10.1021/cm800364t

Reference23 articles.

1. Silicon-based visible light-emitting devices integrated into microelectronic circuits

2. Let there be light

3. Nitrogen doping of tellurium‐based II–VI compounds during growth by molecular beam epitaxy

4. Strain-Induced Two-Dimensional Electron Gas in Selectively DopedSi/SixGe1−xSuperlattices

5. Photoluminescence and electroluminescence of SiGe dots fabricated by island growth

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