Morphology of Thin Films Formed by Oblique Physical Vapor Deposition
Author:
Affiliation:
1. Leibniz Institute of Surface Engineering (IOM), Permoserstraße 15, 04318 Leipzig, Germany
2. Felix-Bloch-Institute for Solid State Physics, University of Leipzig, 04103 Leipzig, Germany
Funder
Deutsche Forschungsgemeinschaft
Publisher
American Chemical Society (ACS)
Subject
General Materials Science
Link
https://pubs.acs.org/doi/pdf/10.1021/acsanm.8b00124
Reference31 articles.
1. Influence of apparatus geometry and deposition conditions on the structure and topography of thick sputtered coatings
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