Direct Visualization of Etching Trajectories in Metal-Assisted Chemical Etching of Si by the Chemical Oxidation of Porous Sidewalls
Author:
Affiliation:
1. Department of Materials Science and Engineering, Yonsei University, 50 Yonsei-ro, Seodaemun-gu, Seoul 120-749, Korea
Funder
National Research Foundation of Korea
Publisher
American Chemical Society (ACS)
Subject
Electrochemistry,Spectroscopy,Surfaces and Interfaces,Condensed Matter Physics,General Materials Science
Link
https://pubs.acs.org/doi/pdf/10.1021/acs.langmuir.5b02453
Reference32 articles.
1. Metal-Assisted Chemical Etching of Silicon: A Review
2. Metal-assisted chemical etching in HF/H2O2 produces porous silicon
3. Dendrite-Assisted Growth of Silicon Nanowires in Electroless Metal Deposition
4. Mechanism of nanowire formation in metal assisted chemical etching
5. Morphology of nanoholes formed in silicon by wet etching in solutions containing HF and H2O2 at different concentrations using silver nanoparticles as catalysts
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1. Structuring of Si into Multiple Scales by Metal‐Assisted Chemical Etching;Advanced Materials;2021-05-19
2. Spontaneous Symmetry Breaking of Nanoscale Spatiotemporal Pattern as the Origin of Helical Nanopore Etching in Silicon;ACS Applied Materials & Interfaces;2019-12-03
3. Minimizing Isolate Catalyst Motion in Metal-Assisted Chemical Etching for Deep Trenching of Silicon Nanohole Array;ACS Applied Materials & Interfaces;2017-06-08
4. Ultra-high aspect ratio functional nanoporous silicon via nucleated catalysts;RSC Advances;2017
5. Etchant wettability in bulk micromachining of Si by metal-assisted chemical etching;Applied Surface Science;2016-05
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