Formation of Aminoxy and Oxo Complexes from the Reaction of Nb(NMe2)5 with O2 and the Crystal Structure of Nb(NEt2)5-Reference-Cited by-同舟云学术

Formation of Aminoxy and Oxo Complexes from the Reaction of Nb(NMe2)5 with O2 and the Crystal Structure of Nb(NEt2)5

Published:2010-03-30 Issue:9 Volume:49 Page:4017-4022
ISSN:0020-1669
Container-title:Inorganic Chemistry
language:en
Short-container-title:Inorg. Chem.

Author:

Chen Shu-Jian¹,Zhang Jian²,Yu Xianghua¹,Bu Xianhui²,Chen Xue-Tai³,Xue Zi-Ling¹

Affiliation:

1. Department of Chemistry, The University of Tennessee, Knoxville, Tennessee 37996-1600

2. Department of Chemistry and Biochemistry, California State University, Long Beach, California 90840

3. State Key Laboratory of Coordination Chemistry, Nanjing National Laboratory of Microstructures, School of Chemistry and Chemical Engineering, Nanjing University, Nanjing 210093, China

Publisher

American Chemical Society (ACS)

Subject

Inorganic Chemistry,Physical and Theoretical Chemistry

Link

https://pubs.acs.org/doi/pdf/10.1021/ic901889m

Reference68 articles.

1. High-κ Dielectric Materials for Microelectronics

2. Chemical vapour deposition of the oxides of titanium, zirconium and hafnium for use as high-k materials in microelectronic devices. A carbon-free precursor for the synthesis of hafnium dioxide

3. HfO2 growth by low-pressure chemical vapor deposition using the Hf(N(C2H5)2)4/O2 gas system

4. Chemical vapor deposition of ultrathin Ta2O5 films using Ta[N(CH3)2]5

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