State Estimation for Integrated Moving Average Processes in High-Mix Semiconductor Manufacturing-Reference-Cited by-同舟云学术

State Estimation for Integrated Moving Average Processes in High-Mix Semiconductor Manufacturing

Published:2013-09-30 Issue:13 Volume:53 Page:5194-5204
ISSN:0888-5885
Container-title:Industrial & Engineering Chemistry Research
language:en
Short-container-title:Ind. Eng. Chem. Res.

Author:

Wang Jin¹,He Q. Peter²,Edgar Thomas F.³

Affiliation:

1. Department of Chemical Engineering, Auburn University, Alabama 36849, United States

2. Department of Chemical Engineering, Tuskegee University, Alabama 36088, United States

3. Department of Chemical Engineering, The University of Texas at Austin, Texas 78712, United States

Publisher

American Chemical Society (ACS)

Subject

Industrial and Manufacturing Engineering,General Chemical Engineering,General Chemistry

Link

https://pubs.acs.org/doi/pdf/10.1021/ie401537d

Reference36 articles.

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3. Mos, E.; Wang, V.; Kisteman, A.; Verstappen, L.; Megens, H.Generalized Data-Sharing and Frequency Domain Optimization of Overlay Run-to-Run Feedback Control.The 6th European AEC/APC Symposium, Dublin, Ireland, 2005.

4. Levin, T.; Geier, I.; Zhivotovsky, A.; Aframiam, N.; Friedlander-Klar, H.Automated Process Control Optimization to Control Low Volume Products Based on High Volume Products Data.Proc. SPIE—Data Anal. Model. Process Control II; 2005; Vol.5755, pp145–146.

5. Just-in-Time Adaptive Disturbance Estimation for Run-to-Run Control of Semiconductor Processes

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