Recursive Bayesian state estimation method for run‐to‐run control in high‐mixed semiconductor manufacturing process-Reference-Cited by-同舟云学术

Recursive Bayesian state estimation method for run‐to‐run control in high‐mixed semiconductor manufacturing process

Published:2018-11-26 Issue:3 Volume:22 Page:1177-1187
ISSN:1561-8625
Container-title:Asian Journal of Control
language:en
Short-container-title:Asian J Control

Author:

Tan Fei¹,Pan Tianhong¹²^ORCID,Bian Jun¹,Wang Haiyan¹,Wang Weiran³

Affiliation:

1. School of Electrical & Information EngineeringJiangsu University China

2. School of Electrical Engineering and AutomationAnhui University China

3. School of Electronics & InformationJiangsu University of Science and Technology China

Funder

National Natural Science Foundation of China

Publisher

Wiley

Subject

Control and Systems Engineering

Link

https://onlinelibrary.wiley.com/doi/pdf/10.1002/asjc.1977

Reference26 articles.

1. D.Ling Y.Zheng H. J.Fang andJ.Zhao ANOVA model based moving window approach for RtR control in high‐mix semiconductor manufacturing industry in European Control Conference Zurich Switzerland (ECC 2013) 3949–3954.

2. Run by run process control: combining SPC and feedback control

3. Semiconductor manufacturing process control and monitoring: A fab-wide framework

4. Run-to-run control and performance monitoring of overlay in semiconductor manufacturing

5. M. D.Ma X. L.Zeng andG. R.Duan A survey of run‐to run control algorithms for high‐mix semiconductor manufacturing process Proc. Chinese Control Conf. (Yantai China 2011) 5474–5479.

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