Accurate and Precise Determination of Mechanical Properties of Silicon Nitride Beam Nanoelectromechanical Devices

Author:

Kim Hakseong1,Shin Dong Hoon2,McAllister Kirstie2,Seo Miri2,Lee Sangik3,Kang Il-Suk4,Park Bae Ho3ORCID,Campbell Eleanor E. B.35,Lee Sang Wook2ORCID

Affiliation:

1. Korea Research Institute of Standards and Science (KRISS), Daejeon 34113, Korea

2. Department of Physics, Ewha Womans University, Seoul 03760, Korea

3. Division of Quantum Phases & Devices, School of Physics, Konkuk University, Seoul 05029, Korea

4. National Nanofab Center, Korea Advanced Institute of Science and Technology, Daejeon 34141, Korea

5. EaStCHEM, School of Chemistry, Edinburgh University, David Brewster Road, Edinburgh EH9 3FJ, U.K.

Funder

National Research Foundation of Korea

Ministry of Trade, Industry and Energy

Korea Institute for Advancement of Technology

Publisher

American Chemical Society (ACS)

Subject

General Materials Science

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