Large-Scale Integration of Nanoelectromechanical Systems for Gas Sensing Applications
Author:
Affiliation:
1. Kavli Nanoscience Institute and Department of Physics, Caltech, Pasadena, CA
2. CEA/LETI - MINATEC, Grenoble, France
Publisher
American Chemical Society (ACS)
Subject
Mechanical Engineering,Condensed Matter Physics,General Materials Science,General Chemistry,Bioengineering
Link
https://pubs.acs.org/doi/pdf/10.1021/nl2037479
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