Catalyst Self-Assembly for Scalable Patterning of Sub 10 nm Ultrahigh Aspect Ratio Nanopores in Silicon-Reference-Cited by-同舟云学术

Catalyst Self-Assembly for Scalable Patterning of Sub 10 nm Ultrahigh Aspect Ratio Nanopores in Silicon

Published:2016-03-21 Issue:12 Volume:8 Page:8043-8049
ISSN:1944-8244
Container-title:ACS Applied Materials & Interfaces
language:en
Short-container-title:ACS Appl. Mater. Interfaces

Author:

Smith Brendan D.¹,Patil Jatin J.¹²,Ferralis Nicola¹,Grossman Jeffrey C.¹

Affiliation:

1. Department of Materials Science and Engineering, Massachusetts Institute of Technology, 77 Massachusetts Avenue, Cambridge, Massachusetts 02139, United States

2. Department of Chemical Engineering, University of Waterloo, 200 University Avenue West, Waterloo, Ontario N2L 6G9, Canada

Funder

Natural Sciences and Engineering Research Council of Canada

Deshpande Center for Technological Innovation, Massachusetts Institute of Technology

Abdul Latif Jameel World Water and Food Security Lab, Massachusetts Institute of Technology

Publisher

American Chemical Society (ACS)

Subject

General Materials Science

Link

https://pubs.acs.org/doi/pdf/10.1021/acsami.6b01927

Reference56 articles.

1. Electrolytic Shaping of Germanium and Silicon

2. Charge- and size-based separation of macromolecules using ultrathin silicon membranes

3. High-Performance Separation of Nanoparticles with Ultrathin Porous Nanocrystalline Silicon Membranes

4. Fabrication of Ultrathin Silicon Nanoporous Membranes and Their Application in Filtering Industrially Important Biomolecules

5. Holey Silicon as an Efficient Thermoelectric Material

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