High-Resolution Resistless Nanopatterning on Polymer and Flexible Substrates for Plasmonic Biosensing Using Stencil Masks
Author:
Affiliation:
1. Microsystems Laboratory, Ecole Polytechnique Fédérale de Lausanne (EPFL), 1015 Lausanne, Switzerland
2. Laboratory of Biosensors and Bioelectronics, Eidgenössische Technische Hochschule Zürich (ETHZ), 8092 Zurich, Switzerland
Publisher
American Chemical Society (ACS)
Subject
General Physics and Astronomy,General Engineering,General Materials Science
Link
https://pubs.acs.org/doi/pdf/10.1021/nn301358n
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