Use of Microhotplate Arrays as Microdeposition Substrates for Materials Exploration
Author:
Affiliation:
1. Chemical Sciences and Technology Laboratory, National Institute of Standards and Technology, Gaithersburg, Maryland 20899
Publisher
American Chemical Society (ACS)
Subject
Materials Chemistry,General Chemical Engineering,General Chemistry
Link
https://pubs.acs.org/doi/pdf/10.1021/cm0108583
Reference33 articles.
1. Metal Organic CVD of Cobalt Thin Films Using Cobalt Tricarbonyl Nitrosyl
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3. Composition and Microstructure of Cobalt Oxide Thin Films Obtained from a Novel Cobalt(II) Precursor by Chemical Vapor Deposition
4. Thin film growth and microstructure analysis of CeO2 prepared by MOCVD
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