Stabilization of Amide-Based Complexes of Niobium and Tantalum Using Malonates as Chelating Ligands: Precursor Chemistry and Thin Film Deposition-Reference-Cited by-同舟云学术

Stabilization of Amide-Based Complexes of Niobium and Tantalum Using Malonates as Chelating Ligands: Precursor Chemistry and Thin Film Deposition

Published:2007-11-08 Issue:25 Volume:19 Page:6077-6087
ISSN:0897-4756
Container-title:Chemistry of Materials
language:en
Short-container-title:Chem. Mater.

Author:

Hellwig Malte¹,Milanov Andrian¹,Barreca Davide¹,Deborde Jean-Laurent¹,Thomas Reji¹,Winter Manuela¹,Kunze Ulrich¹,Fischer Roland A.¹,Devi Anjana¹

Affiliation:

1. Inorganic Materials Chemistry Group, Lehrstuhl für Anorganische Chemie II, Ruhr-University Bochum, 44801 Bochum, Germany; ISTM-CNR and INSTM, Department of Chemistry, Padova University, Via Marzolo, 1, 35131 Padova, Italy; Institute for Electronic Materials and Nanoelectronics, Ruhr-University Bochum, 44801 Bochum, Germany; and IFF-Institut für Festkörperforschung and CNI-Center for Nanoelectronic Systems for Information Technology, Forschungszentrum Jülich, 52425 Jülich, Germany

Publisher

American Chemical Society (ACS)

Subject

Materials Chemistry,General Chemical Engineering,General Chemistry

Link

https://pubs.acs.org/doi/pdf/10.1021/cm0630441

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