Electrodialysis Process for the Recycling and Concentrating of Tetramethylammonium Hydroxide (TMAH) from Photoresist Developer Wastewater
Author:
Affiliation:
1. CAS Key Laboratory of Soft Matter Chemistry, Laboratory of Functional Membranes, School of Chemistry and Materials Science, University of Science and Technology of China, Hefei, Anhui 230026, People’s Republic of China
Publisher
American Chemical Society (ACS)
Subject
Industrial and Manufacturing Engineering,General Chemical Engineering,General Chemistry
Link
https://pubs.acs.org/doi/pdf/10.1021/ie4023995
Reference20 articles.
1. On The Dissolution Kinetics Of Positive Photoresists: The Secondary Structure Model
2. Anisotropic etching of silicon in TMAH solutions
3. Mortality from Dermal Exposure to Tetramethylammonium Hydroxide
4. Toxicity of tetramethylammonium hydroxide: Review of two fatal cases of dermal exposure and development of an animal model
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