Block Copolymer Micelles as Switchable Templates for Nanofabrication
Author:
Affiliation:
1. Centre Suisse d'Electronique et de Microtechnique SA, Jaquet Droz 1, CH-2007 Neuchâtel, Switzerland, and Ecole Polytechnique Fédérale de Lausanne (EPFL), Microsystems Laboratory (LMIS), CH-1015 Lausanne, Switzerland
Publisher
American Chemical Society (ACS)
Subject
Electrochemistry,Spectroscopy,Surfaces and Interfaces,Condensed Matter Physics,General Materials Science
Link
https://pubs.acs.org/doi/pdf/10.1021/la052299a
Reference29 articles.
1. Nanostructure fabrication using block copolymers
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4. Process integration of self-assembled polymer templates into silicon nanofabrication
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