Spectroscopic Study of AlN Film Formation by the Sequential Reaction of Ammonia and Trimethylaluminum on Alumina
Author:
Affiliation:
1. Department of Chemistry and Laboratory for Surface Studies, University of WisconsinMilwaukee, Milwaukee, Wisconsin 53211
Publisher
American Chemical Society (ACS)
Subject
Materials Chemistry,General Chemical Engineering,General Chemistry
Link
https://pubs.acs.org/doi/pdf/10.1021/cm9601906
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