Determination of Particle-Bound Metallic Impurities in Semiconductor Grade Gases. 1. Silane
Author:
Publisher
American Chemical Society (ACS)
Subject
Analytical Chemistry
Link
https://pubs.acs.org/doi/pdf/10.1021/ac960428%2B
Reference37 articles.
1. Purification techniques and analytical methods for gaseous and metallic impurities in high-purity silane
2. Particulate Contamination and Microelectronics Manufacturing: An Introduction
3. Anisotropic magnetoconductance in metallic doped Ge:Sb
4. The impact of surface analysis technology on the development of semiconductor wafer cleaning processes
5. Degradation of metal‐oxide‐semiconductor devices caused by iron impurities on the silicon wafer surface
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