Proficiency Testing for Metal Impurities Analysis at the ppb Level by Comparisons between Japan and U.S. Laboratories of a Private Company-Reference-Cited by-同舟云学术

Proficiency Testing for Metal Impurities Analysis at the ppb Level by Comparisons between Japan and U.S. Laboratories of a Private Company

Published:2005 Issue:8 Volume:54 Page:727-730
ISSN:0525-1931
Container-title:BUNSEKI KAGAKU
language:en
Short-container-title:Bunseki kagaku

Author:

SAKATA Susumu¹,NAKAGAWA Katsuhiro¹,ARIMURA Tadanobu¹,NAKAMURA Hisao²,JOHNSON Greg³,WISTRAND Dan³,KIMIJIMA Tetsuya¹,YAMAZAWA Masaru⁴,SHIKAKUME Kazuhiro⁴

Affiliation:

1. Taiyo Nippon Sanso Corp.

2. Japan Fine Products, Inc.

3. Matheson Tri-Gas, Inc.

4. Chemicals Evaluation and Research Institute, Japan

Publisher

Japan Society for Analytical Chemistry

Subject

Analytical Chemistry

Link

http://www.jstage.jst.go.jp/article/bunsekikagaku/54/8/54_8_727/_pdf

Reference8 articles.

1. 1) Semiconductor Industry Association: International Technology Roadmap for Semiconductors 2004 Update (2004).

2. 2) Semiconductor Equipment and Materials International: SEMI Standards.

3. Determination of Particle-Bound Metallic Impurities in Semiconductor Grade Gases. 1. Silane

4. 4) J. Vogl, C. Quetel, M. Ostermann, I. Papadakis, L. Nevel, P. Taylor: Accred. Qual. Assur., 5, 272 (2000).

5. 5) I. Papadakis, R. Kessel, L. Nevel, J. Norgaard, Y. Aregbe, M. Smet, P. Smeyers, P. Taylor: Accred. Quel. Assur., 9, 704 (2004).

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