Demonstration of a Directly Photopatternable Spin-On-Glass Based on Hydrogen Silsesquioxane and Photobase Generators
Author:
Affiliation:
1. Dow Corning Asia Ltd., Research Center, 603 Kishi, Yamakita, Kanagawa 258-01, Japan
Publisher
American Chemical Society (ACS)
Subject
Materials Chemistry,Inorganic Chemistry,Polymers and Plastics,Organic Chemistry
Link
https://pubs.acs.org/doi/pdf/10.1021/ma980168t
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1. Chemical amplification mechanisms for microlithography
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