Progress in the chemistry of organosilicon resists
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Published:1994-01
Issue:1
Volume:5
Page:70-78
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ISSN:1042-7147
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Container-title:Polymers for Advanced Technologies
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language:
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Short-container-title:Polym. Adv. Technol.
Subject
Polymers and Plastics
Cited by
29 articles.
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