Atomic Layer Deposition of Aluminum Oxide Thin Films from a Heteroleptic, Amidinate-Containing Precursor
Author:
Affiliation:
1. Department of Chemistry, Carleton University, 1125 Colonel By Drive, Ottawa, Ontario K1S 5B6, Canada
Publisher
American Chemical Society (ACS)
Subject
Materials Chemistry,General Chemical Engineering,General Chemistry
Link
https://pubs.acs.org/doi/pdf/10.1021/cm802195b
Reference20 articles.
1. Sunola, T.; Antson, J.U.S. patent No. 4058430,1977.
2. Al2O3 coatings against high temperature corrosion deposited by metal-organic low pressure chemical vapour deposition
3. Optical properties and environmental stability of oxide coatings deposited by reactive sputtering
4. Introducing atomic layer epitaxy for the deposition of optical thin films
5. Layered tantalum-aluminum oxide films deposited by atomic layer epitaxy
Cited by 31 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Boron Complexes with Propiolamidinato Ligands: Synthesis, Structure, and Photophysical Properties;Inorganic Chemistry;2024-06-14
2. Self-reducing precursors for aluminium metal thin films: evaluation of stable aluminium hydrides for vapor phase aluminium deposition;Dalton Transactions;2024
3. Synthesis and characterization of new low molecular weight aluminum organometallic complexes using amino/imine type ligands with possible uses in Atomic Layer Deposition processes;Journal of Organometallic Chemistry;2023-06
4. Undirected C-H Bond Activation in Aluminium Hydrido Enaminonates;Molecules;2023-02-24
5. Advanced Material Engineering to Tailor Nucleation and Growth towards Uniform Deposition for Anode‐Less Lithium Metal Batteries;Small;2022-11
1.学者识别学者识别
2.学术分析学术分析
3.人才评估人才评估
"同舟云学术"是以全球学者为主线，采集、加工和组织学术论文而形成的新型学术文献查询和分析系统，可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容，当前同舟云学术共收录了国内外主流学术期刊6万余种，收集的期刊论文及会议论文总量共计约1.5亿篇，并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询！咨询电话：010-8811{复制后删除}0370
www.globalauthorid.com
TOP
Copyright © 2019-2024 北京同舟云网络信息技术有限公司 京公网安备11010802033243号 京ICP备18003416号-3