Sealing of Hard CrN and DLC Coatings with Atomic Layer Deposition-Reference-Cited by-同舟云学术

Sealing of Hard CrN and DLC Coatings with Atomic Layer Deposition

Published:2014-01-27 Issue:3 Volume:6 Page:1893-1901
ISSN:1944-8244
Container-title:ACS Applied Materials & Interfaces
language:en
Short-container-title:ACS Appl. Mater. Interfaces

Author:

Härkönen Emma¹,Kolev Ivan²,Díaz Belén³,Światowska Jolanta³,Maurice Vincent³,Seyeux Antoine³,Marcus Philippe³,Fenker Martin⁴,Toth Lajos⁵,Radnoczi György⁵,Vehkamäki Marko¹,Ritala Mikko¹

Affiliation:

1. Laboratory of Inorganic Chemistry, University of Helsinki, P.O. Box 55, FIN-00014 Helsinki, Finland

2. Hauzer Techno Coating BV, 5928 LL Venlo, the Netherlands

3. Laboratoire de Physico-Chimie des Surfaces, CNRS (UMR 7075), Chimie ParisTech (ENSCP), F-75005 Paris, France

4. FEM Research Institute, Precious Metals and Metals Chemistry, D-73525 Schwäbisch Gmünd, Germany

5. Research Centre for Natural Sciences HAS (MTA TKK), 1025 Budapest, Hungary

Publisher

American Chemical Society (ACS)

Subject

General Materials Science

Link

https://pubs.acs.org/doi/pdf/10.1021/am404906x

Reference56 articles.

1. Physical vapor deposition tool coatings

2. Magnetron sputtering: a review of recent developments and applications

3. Chromium nitride coatings grown by unbalanced magnetron (UBM) and combined arc/unbalanced magnetron (ABS™) deposition techniques

4. Microstructure and mechanical/thermal properties of Cr–N coatings deposited by reactive unbalanced magnetron sputtering

5. Electrochemical behaviour of chromium nitride coatings with various preferred orientations deposited on steel by unbalanced magnetron sputtering

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