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Synthesis and Volatility Characterization of Mo(II) and W(II) Compounds for Thin Films

  • Published:2023-10-03 Issue:41 Volume:62 Page:16874-16881
  • ISSN:0020-1669
  • Container-title:Inorganic Chemistry
  • language:en
  • Short-container-title:Inorg. Chem.

Author:

Park Da-Ae1,Son Ji Young12,Seo Ji Min13,Park Bo Keun14ORCID

Affiliation:

1. Thin Film Materials Research Center, Korea Research Institute of Chemical Technology (KRICT),Daejeon 34114, Republic of Korea

2. Department of Chemistry, Korea University 145 Anam-ro, Seongbuk-gu, Seoul 02841, Republic of Korea

3. Department of Chemistry, Sungkyunkwan University, Suwon-si, Gyeonggi-do 16419, Republic of Korea

4. Advanced Materials and Chemical Engineering, KRICT School, University of Science and Technology (UST), Daejeon 34114, Republic of Korea

Funder

Korea Semiconductor Research Consortium

Korea Research Institute of Chemical Technology

Ministry of Trade, Industry and Energy

Publisher

American Chemical Society (ACS)

Subject

Inorganic Chemistry,Physical and Theoretical Chemistry
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