Thermodynamic Study of Small Silicon Carbide Clusters with a Mass Spectrometer
Author:
Affiliation:
1. Department of Chemistry, Texas A&M University, College Station, Texas 77843
Publisher
American Chemical Society (ACS)
Subject
Physical and Theoretical Chemistry
Link
https://pubs.acs.org/doi/pdf/10.1021/jp964093b
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1. Investigation of the chemical vapor deposition of silicon carbide from tetramethylsilane by in situ temperature and gas composition measurements
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