Correlation between Roughness of Nanowires and Polymer Backbone Conformation-Reference-Cited by-同舟云学术

Correlation between Roughness of Nanowires and Polymer Backbone Conformation

Published:2006-09-19 Issue:21 Volume:39 Page:7446-7450
ISSN:0024-9297
Container-title:Macromolecules
language:en
Short-container-title:Macromolecules

Author:

Seki Shu¹,Tsukuda Satoshi¹,Tagawa Seiichi¹,Sugimoto Masaki¹

Affiliation:

1. The Institute of Scientific and Industrial Research, Osaka University, 8-1 Mihogaoka, Ibaraki, Osaka 567-0047, Japan, and Quantum Beam Science Directorate, Japan Atomic Energy Research Agency, 1233 Watanukimachi, Takasaki 370-1292, Japan

Publisher

American Chemical Society (ACS)

Subject

Materials Chemistry,Inorganic Chemistry,Polymers and Plastics,Organic Chemistry

Link

https://pubs.acs.org/doi/pdf/10.1021/ma0612172

Reference27 articles.

1. Process dependence of roughness in a positive-tone chemically amplified resist

2. Reduction of line edge roughness in the top surface imaging process

3. Nano edge roughness in polymer resist patterns

4. Study of the acid-diffusion effect on line edge roughness using the edge roughness evaluation method

5. Resolution blur of latent acid image and acid generation efficiency of chemically amplified resists for electron beam lithography

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