Insights into Laser Ablation Processes of Heterogeneous Samples: Toward Analysis of Through-Silicon-Vias-Reference-Cited by-同舟云学术

Insights into Laser Ablation Processes of Heterogeneous Samples: Toward Analysis of Through-Silicon-Vias

Published:2018-05-03 Issue:11 Volume:90 Page:6666-6674
ISSN:0003-2700
Container-title:Analytical Chemistry
language:en
Short-container-title:Anal. Chem.

Author:

Moreno-García Pavel¹^ORCID,Grimaudo Valentine¹^ORCID,Riedo Andreas²³^ORCID,Cedeño López Alena¹,Wiesendanger Reto²,Tulej Marek²,Gruber Cynthia⁴,Lörtscher Emanuel⁴,Wurz Peter²^ORCID,Broekmann Peter¹^ORCID

Affiliation:

1. Department of Chemistry and Biochemistry, University of Bern, Freiestrasse 3, CH-3012 Bern, Switzerland

2. Physics Institute, Space Research and Planetary Sciences, University of Bern, Sidlerstrasse 5, CH-3012 Bern, Switzerland

3. Sackler Laboratory for Astrophysics, Leiden Observatory, Leiden University, Niels Bohrweg 2, 2333 CA Leiden, The Netherlands

4. IBM Research−Zurich, Science and Technology Department, Säumerstrasse 4, CH-8803 Rüschlikon, Switzerland

Funder

Schweizerischer Nationalfonds zur F?rderung der Wissenschaftlichen Forschung

Publisher

American Chemical Society (ACS)

Subject

Analytical Chemistry

Link

https://pubs.acs.org/doi/pdf/10.1021/acs.analchem.8b00492

Reference43 articles.

1. Through-Silicon Via (TSV)

2. Superconformal Electrodeposition of Copper

3. Copper plating for 3D interconnects

4. High-Aspect-Ratio Copper-Via-Filling for Three-Dimensional Chip Stacking

5. Filling of microvia with an aspect ratio of 5 by copper electrodeposition

Cited by 9 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Quantitative laser–matter interaction: a 3D study of UV-fs-laser ablation on single crystalline Ru(0001);Optics Express;2023-05-12

2. Automated, 3‐D and Sub‐Micron Accurate Ablation‐Volume Determination by Inverse Molding and X‐Ray Computed Tomography;Advanced Science;2022-05-06

3. Characterization of femtosecond laser ablation processes on as-deposited SnAg solder alloy using laser ablation ionization mass spectrometry;Spectrochimica Acta Part B: Atomic Spectroscopy;2021-06

4. Current Progress in Femtosecond Laser Ablation/Ionisation Time-of-Flight Mass Spectrometry;Applied Sciences;2021-03-12

5. LASER IONIZATION MASS SPECTROMETRY AT 55: QUO VADIS?;Mass Spectrometry Reviews;2020-11-10