Correlative Microscopy in 3D: Helium Ion Microscopy-Based Photogrammetric Topography Reconstruction Combined with in situ Secondary Ion Mass Spectrometry
Author:
Affiliation:
1. Advanced Instrumentation for Ion Nano-Analytics (AINA), MRT Department, Luxembourg Institute of Science and Technology (LIST), 4422 Belvaux, Luxembourg
Funder
Fonds National de la Recherche Luxembourg
Publisher
American Chemical Society (ACS)
Subject
Analytical Chemistry
Link
https://pubs.acs.org/doi/pdf/10.1021/acs.analchem.8b02530
Reference23 articles.
1. High-resolution high-sensitivity elemental imaging by secondary ion mass spectrometry: from traditional 2D and 3D imaging to correlative microscopy
2. Correlative Microscopy Combining Secondary Ion Mass Spectrometry and Electron Microscopy: Comparison of Intensity–Hue–Saturation and Laplacian Pyramid Methods for Image Fusion
3. Combined SIMS-SPM instrument for high sensitivity and high-resolution elemental 3D analysis
4. High sensitivity and high resolution element 3D analysis by a combined SIMS–SPM instrument
5. The SFM/ToF-SIMS combination for advanced chemically-resolved analysis at the nanoscale
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