Combined SIMS-SPM instrument for high sensitivity and high-resolution elemental 3D analysis-Reference-Cited by-同舟云学术

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Combined SIMS-SPM instrument for high sensitivity and high-resolution elemental 3D analysis

Published:2012-04-25 Issue:1 Volume:45 Page:513-516
ISSN:0142-2421
Container-title:Surface and Interface Analysis
language:en
Short-container-title:Surf. Interface Anal.

Author:

Wirtz Tom¹,Fleming Yves¹,Gysin Urs²,Glatzel Thilo²,Wegmann Urs,Meyer Ernst²,Maier Urs³,Rychen Jörg⁴

Affiliation:

1. Department ‘Science and Analysis of Materials’ (SAM); Centre de Recherche Public - Gabriel Lippmann; 41 rue du Brill; L-4422; Belvaux; Luxembourg

2. Department of Physics; University of Basel; Klingelbergstr. 82; CH-4056; Basel; Switzerland

3. Ferrovac GmbH; Thurgauerstr. 72; CH-8050; Zürich; Switzerland

4. SPECS Zurich GmbH; Technoparkstr. 1; CH-8005; Zürich; Switzerland

Publisher

Wiley

Subject

Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics,General Chemistry

Reference14 articles.

1. A high brightness source for nano-probe secondary ion mass spectrometry

2. Quest for high brightness, monochromatic noble gas ion sources

3. Use of a duoplasmatron ion source for negative ion generation

4. Depth profiling using ultra-low-energy secondary ion mass spectrometry

5. Topography and field effects in the quantitative analysis of conductive surfaces using ToF-SIMS

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