Visible to Mid-IR Spectromicroscopy with Top-Down Illumination and Nanoscale (≈10 nm) Resolution
Author:
Affiliation:
1. Nanoscale Device Characterization Division, Physical Measurement Laboratory, National Institute of Standards and Technology, 100 Bureau Drive, Gaithersburg, Maryland 20899, United States
Publisher
American Chemical Society (ACS)
Subject
Analytical Chemistry
Link
https://pubs.acs.org/doi/pdf/10.1021/acs.analchem.2c03685
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