1. Agilent
Technologies, Hewlett-Packard
Str. 8, D 76337 Waldbronn, Germany
2. IMTEK
− Department of Microsystems Engineering, University of Freiburg, D-79110 Freiburg, Germany
3. Haute
Ecole Arc Ingénierie, University of Applied Sciences, 2610 St.Imier, Switzerland