1. Light Technology Institute, Karlsruhe Institute of Technology, Engesserstrasse 13, 76131 Karlsruhe, Germany
2. InnovationLab GmbH, Speyererstrasse 4, 69115 Heidelberg, Germany
3. Kirchhoff Institute for Physics, Heidelberg University, Im Neuenheimerfeld 225, 69120 Heidelberg, Germany
4. Institute of Microstructure Technology, Karlsruhe Institute of Technology, Hermann-von-Helmholtz-Platz 1, 76344 Eggenstein-Leopoldshafen, Germany